Electrolysis Ozone Water Generator

High Performance

Robustness

Long Life

Feature

Feature
  • Operates on an ozone water generation principle using a super pure water electrolysis method that is cleaner than the discharge method.
  • Supports a flow of more than 100 mg/L ozone water and more than 80 L/min ozone water.
  • The ozone water density and amount of flow can be adjusted according to customer's needs.
  • This is recommended for use as a high density/large flow batch type washer, high density/small flow sheet-fed type washer and low density/large flow continuous shower type.
  • Compact design to save space.
  • High regurgitation pressure actualized with the high pressure ozone generator and booster pump.
  • High-speed startup (3 minutes) from start up.

Usage

  • Silicon wafer production field: Epi pre-washing, ion injection pre-washing, washing after flatting, pure water sterilization
  • Semiconductor production field: Wash incoming wafer, wash before film generation, resisto crud removal, resisto removal, pure water line sterilization, washing after CMP
  • LCD production field: Wash incoming glass substrate, wash before film generation, pure water line sterilization

Electrolysis ozone water generation process

Electrolysis ozone water generation process

Standard model data

Model Name

Ozone water density(mg/L)

Amount of ozone water (L/min.)

Dimension (WxDxH mm)

Weight (kg)

Power capacity (kVA)

CO2 gas feed

POW-2010-S

20

10

900x1,000x1,900

650

11.9 (3φAC200V)

add/no

POW-6005-S-C

60

5

900x1,000x1,900

700

12 (3φAC200V)

add

POW-10005-SP-C

100

5

1,300x1,300x1,900

1200

17.1 (3φAC200V)

add

Utility

1. Power (confirm voltage and frequency)
2. Pure water (super pure water at more than 17MΩ/cm) Water temperature is lower than 25
  degree. Content hydrogen peroxide density is less than 50ppb)
3. Cooling water (23 degree ±3 degree)
4. Control air (0.5-0.7MPa)
5. Heat exhaust duct
6. Drain line (gravity flow or pump discharge.)

Optional

1. Ozone water booster unit
2. Agent injection unit
3. CO2 gas feed unit
4. Water saving system