Electrolysis Ozone Gas Generator

High Performance

Robustness

Long Life

Feature

Consistently supply ozone gas at more than 200g/m3(N)
Possible to supply dry ozone gas (with dryer)
The level of ozone gas generation can be freely adjusted

Usage

Semiconductor production field: For CVD, it is used as an oxidant by mixing with fomentation.

Ozone gas generation process

Standard model data

Model Name	Ozone gas density (g/m3(N))	Amount of ozone gas (g/hr)	Dimension (WxDxH mm)	Weight (kg)	Power capacity (kVA)
POG-24-S	> 200	> 24	600x800x1,500	250	6.8 (3φAC200V)
POG-48-S	> 200	> 48	600x800x1,700	350	11.9 (3φAC200V)
POG-120-S	> 200	> 120	1,200x1,300x2,000	500	18 (3φAC200V)

Utility

1. Power (confirm voltage and frequency)
2. Pure water (super pure water at more than 2MΩ/cm)
3. Cooling water (23 degree ±3 degree)
4. Control air (0.5-0.7MPa)
5. Heat exhaust duct
6. Drain line (gravity flow)

Optional

1. Exhaust ozone gas separator/catalyzer
2. Ozone gas dryer (dew point lower than -70 degree)
3. High-pressure ozone gas generation unit (-400kPa)
4. Environment ozone monitor